Title :
Packaging of ZnO nanobelts as nanosensors: Synthesis, Alignment and Characterization
Author :
Liu, Jin ; Lao, Changshi ; Tummala, Rao R. ; Wang, Zhong Lin
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
One-dimensional ZnO nanobelt exhibits unique properties which makes it a perfect candidate for sensors in various applications. In this paper, synthesis of ZnO nanobelts is described. Design and fabrication of electrodes are presented. Alignment of nanobelts, which is assisted by the optimized designed electrode, is discussed. Dramatic improvement of the contact resistance is found after the sample is annealed at 500degC for 1 min. This work lays the foundation for further fabrication, fictionalization and packaging of ZnO nanobelt based sensors
Keywords :
annealing; nanoelectronics; nanostructured materials; semiconductor device packaging; sensors; 1 min; 500 C; ZnO; ZnO nanobelt; electrode design; electrode fabrication; nanobelt alignment; nanobelt fictionalization; nanobelt packaging; nanosensors; Contact resistance; Electrodes; Fabrication; Furnaces; Materials science and technology; Nanoscale devices; Packaging; Scanning electron microscopy; Temperature; Zinc oxide;
Conference_Titel :
Electronic Packaging Technology, 2005 6th International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
0-7803-9449-6
DOI :
10.1109/ICEPT.2005.1564727
