Title :
Nano-powder-magnetic-core vertically stacked-spiral RF inductor in CMOS
Author :
Zhan, J. ; Yang, C. ; Wang, X. ; Ren, T.L. ; Wang, A. ; Yang, Y. ; Liu, L.T. ; Yang, L.W.
Author_Institution :
IME, Tsinghua Univ., Beijing, China
Abstract :
This paper reports a novel concept of vertically stacked-spiral RF inductor with integrated nano-powder-magnetic-core in standard CMOS. Prototype inductors in a foundry 0.18μm 6-metal CMOS and a post-CMOS backend process module (i.e., CMOS+) are fabricated and measured. Result shows the proof-of-concept designs greatly increase the inductance, L, by up to 34% and the factor, Q, by 62% over a multi-GHz frequency range.
Keywords :
CMOS integrated circuits; inductors; nanoparticles; 6-metal CMOS process; backend process module; nanopowder-magnetic-core; post-CMOS backend process module; proof-of-concept designs; size 0.18 mum; vertically stacked-spiral RF inductor; CMOS integrated circuits; Coils; Inductors; Magnetic cores; Metals; Powders; Radio frequency; CMOS; CMOS+; RF; inductor; magnetic core; nano powder; vertically stacked-spiral;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of
Conference_Location :
Tianjin
Print_ISBN :
978-1-4577-1998-1
Electronic_ISBN :
Pending
DOI :
10.1109/EDSSC.2011.6117668
