DocumentCode
2850669
Title
Preparation of micro fluidic chip based on SU-8 mold
Author
Wu, Yuan-Qing ; Yao, Su-Ying
Author_Institution
Sch. of Electron. & Inf. Eng., Tianjin Univ., Tianjin, China
fYear
2011
fDate
17-18 Nov. 2011
Firstpage
1
Lastpage
2
Abstract
As the silicon mold has rough edges, microchip is not conducive to fluid movement. In this paper, mold was produced by SU-8, and a set of production process was given. Then this paper made anti-stick layer on the mold, in order to improve mold re-use rate. Author discussed the impact of curing temperature and the ratio of PDMS and curing agent on the device, and does modification on casting PDMS, then seal to complete the microarray.
Keywords
casting; curing; microfluidics; moulding; PDMS casting; SU-8 mold; antistick layer; curing agent; curing temperature; microarray; microfluidic chip preparation; mold reuse rate; production process; silicon mold; Curing; Fluidic microsystems; Microfluidics; Polymers; Silicon; Surface treatment; PDMS; SU-8; micro fluidics;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of
Conference_Location
Tianjin
ISSN
Pending
Print_ISBN
978-1-4577-1998-1
Electronic_ISBN
Pending
Type
conf
DOI
10.1109/EDSSC.2011.6117676
Filename
6117676
Link To Document