Title :
Verilog-A modeling and design of a micromachined capacitive accelerometer
Author :
Haojiong, Li ; Mingming, Zhang ; Zhongjian, Chen ; Jingqing, Huang ; Xiangyun, Meng ; Wengao, Lu ; Yacong, Zhang ; Weiguo, Su ; Song, Li
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
Abstract :
In order to design accelerometers, electromechanical hybrid simulation with the sensor and interface circuit together is required. In this paper a Verilog-A model for the accelerometer sensor is presented, and based on the Verilog-A model presented, an open-loop capacitive accelerometer with a full-scale range of ±2g is presented. The Verilog-A model, characterizing the properties of the sensor, is compared to be right with the Matlab model published before. The accelerometer is tested to achieve the equivalent noise acceleration (ENA) about 7.7μg/√Hz.
Keywords :
accelerometers; microsensors; Verilog-A model; accelerometer sensor; equivalent noise acceleration; micromachined capacitive accelerometer; Acceleration; Accelerometers; Atmospheric modeling; Hardware design languages; Integrated circuit modeling; Mathematical model; Noise; Capacitive accelerometer; Interface circuit; Low noise; Verilog-A model;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of
Conference_Location :
Tianjin
Print_ISBN :
978-1-4577-1998-1
Electronic_ISBN :
Pending
DOI :
10.1109/EDSSC.2011.6117734