Digital Holographic System for Three-Dimensional Microstructure Measurement

Author

Huang, Min ; Zhao, Baoqun ; Wang, Huaying

Author_Institution

Coll. of Sci., Hebei Univ. of Eng., Handan, China

fYear

2009

fDate

19-20 Dec. 2009

Firstpage

1

Lastpage

4

Abstract

Digital holography is a digitized holography, which is very suitable for phase imaging of microstructure object. An off-axis lensless Fourier transform digital holographic system was built and analyzed. The recording and numerical reconstruction of digital hologram was discussed. The model of phase aberration in numerical reconstruction of wavefront was presented. Experimental investigations were performed for a USAF test target. The accurate phase image was obtained by combining an automatic phase aberration compensation procedure and manual adjustment process. The lateral resolution of approaching to the theoretical limit was achieved experimentally. Also, the height profiles of the test target was obtained and given.

Keywords

Fourier transform optics; aberrations; electronic speckle pattern interferometry; optical design techniques; optical microscopy; 3D microstructure measurement; USAF test target; automatic phase aberration; off axis lensless Fourier transform digital holographic system; phase imaging; Digital recording; Fourier transforms; Holography; Image reconstruction; Laser beams; Microscopy; Microstructure; Optical imaging; Phase measurement; Sensor arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Engineering and Computer Science, 2009. ICIECS 2009. International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-4994-1

Type

conf

DOI

10.1109/ICIECS.2009.5365440

Filename

5365440