Title :
A new interlayer interconnect technology for multilayer fabrication
Author :
Neuberger, D. ; Jacobus, Dan ; Lenihan, Tim ; Robinson, Courtland ; Matijasevic, Goran ; Ha, Linh ; Gallagher, Catherine ; Castello, Christopher ; Gandhi, Pradeep
Author_Institution :
Sheldahl Inc., Northfield, MN, USA
Abstract :
A novel approach to multilayered circuitry based on flexible substrates has been established by prototype manufacture of test vehicles. The multilayered circuitry is comprised of new conductive bondply and layer pairs (ViaThinTM) based on 50 μm (2 mil) polyimide film. The bondply base film is patterned with 100 μm (4 mil) vias and filled with an organic-metallic composite material (Ormeto R) used to interconnect the layer pairs. Circuit traces of 50 μm (2 mil) width, multilayered capture pads of 225 μm (9 mil) diameter, and integrally formed conductive vias of 25 μm (1 mil) diameter comprise the layer pairs in the work described here. The bondply vertically interconnects the layer pairs using a lamination process common in the printed circuit board industry. Eight-layer circuits have been fabricated, employing four circuit layer pairs and three bondply interlayers. The multilayer technology presented was developed within the DARPA-funded MCM-L consortium
Keywords :
composite materials; dielectric thin films; integrated circuit interconnections; integrated circuit packaging; laminates; multichip modules; polymer films; printed circuit testing; 1 mil; 100 micron; 2 mil; 225 micron; 25 micron; 4 mil; 50 micron; 9 mil; MCM-L; ViaThin conductive bondply/layer pairs; bondply base film patterning; bondply interlayers; bondply vertical interconnects; circuit layer pairs; circuit traces; eight-layer circuits; flexible substrates; integrally formed conductive vias; interlayer interconnect technology; lamination process; layer pair interconnects; multilayer fabrication; multilayer technology; multilayered capture pads; multilayered circuitry; organic-metallic composite filler material; polyimide film; prototype manufacture; test vehicles; vias; Bonding; Circuit testing; Fabrication; Flexible manufacturing systems; Flexible printed circuits; Integrated circuit interconnections; Nonhomogeneous media; Prototypes; Substrates; Vehicles;
Conference_Titel :
Multichip Modules and High Density Packaging, 1998. Proceedings. 1998 International Conference on
Conference_Location :
Denver, CO
Print_ISBN :
0-7803-4850-8
DOI :
10.1109/ICMCM.1998.670783