• DocumentCode
    2852274
  • Title

    An IC piezoresistive pressure sensor for biomedical instrumentation

  • Author

    Samaun, S. ; Wise, K. ; Nielsen, E. ; Angell, J.

  • Author_Institution
    Stanford University, Stanford, CA, USA
  • Volume
    XIV
  • fYear
    1971
  • fDate
    17-19 Feb. 1971
  • Firstpage
    104
  • Lastpage
    105
  • Abstract
    A thin-diaphragm diffused piezoresistive pressure sensor has been developed for biomedical instrumentation using monolithic IC techniques. Anisotropic etching affords large-area, 5μ thick diaphragms with high yield, and simple temperature compensation eliminates residual temperature drift.
  • Keywords
    Biomedical measurements; Biomedical transducers; Biosensors; Bridge circuits; Etching; Fabrication; Piezoresistance; Resistors; Silicon; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1971 IEEE International
  • Conference_Location
    Philadelphia, PA, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1971.1154987
  • Filename
    1154987
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2852274