Abstract :
The following topics are dealt with: fully-depleted SOI; FinFET; RF circuits; memory circuits; substrate engineering; MEMS; and photonics.
Keywords :
MOSFET; digital storage; elemental semiconductors; micromechanical devices; silicon-on-insulator; FinFET; MEMS; RF circuits; fully-depleted SOI; memory circuits; photonics; substrate engineering;
Conference_Titel :
SOI Conference (SOI), 2012 IEEE International
Conference_Location :
NAPA, CA
Print_ISBN :
978-1-4673-2690-2
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2012.6404350
