Title :
Design and materials selection for low power laterally actuating nanoelectromechanical relays
Author :
Yoo, Kwang ; Lee, Daewoo ; Tiberio, R. ; Conway, J. ; Wong, H.-S Philip ; Nishi, Yoshio
Author_Institution :
Stanford Univ., Stanford, CA, USA
Abstract :
This paper reports the design optimization of lateral nanoelectromechanical (NEM) relays for sub 1V actuation by COMSOL simulation with various materials and structures. Measured actuation voltages from fabricated relays showed good matching with simulation.
Keywords :
low-power electronics; nanoelectromechanical devices; nanoelectronics; relays; COMSOL simulation; NEM relays; low power laterally actuating nanoelectromechanical relays; material selection; measured actuation voltages; Fabrication; Logic gates; Relays; Semiconductor device modeling; Solids; Structural beams;
Conference_Titel :
SOI Conference (SOI), 2012 IEEE International
Conference_Location :
NAPA, CA
Print_ISBN :
978-1-4673-2690-2
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2012.6404401
