Title :
Silicon-based nanoplasmonic disc resonator on CMOS platform
Author :
Nielsen, M.P. ; Elezzabi, A.Y.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
Abstract :
The first demonstration of a silicon-based metal-insulator-semiconductor (MIS) nanoplasmonic disc resonator monolithically integrated on a CMOS compatible platform is presented. The nanoplasmonic disc resonator is integrated with Au/SiO2/Si MIS nanoplasmonic waveguides and conventional silicon-on-insulator photonic waveguides. The device has a high plasmonic quality (Q) factor of 82.3, one of the highest reported for an integrated silicon-based nanoplasmonic device, with a compact device footprint of only 4 μm2.
Keywords :
CMOS integrated circuits; MIS devices; Q-factor; elemental semiconductors; gold; silicon; silicon-on-insulator; Au-SiO2-Si; CMOS compatible platform; Q factor; SOI; compact device footprint; complementary metal-oxide-semiconductor electronics; integrated silicon-based nanoplasmonic device; metal-insulator-semiconductor nanoplasmonic disk resonator; nanoplasmonic waveguides; quality factor; silicon-on-insulator photonic waveguides;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2013.2209
