• DocumentCode
    2853444
  • Title

    Backside E-Beam Probing on Nano scale devices

  • Author

    Schlangen, Rudolf ; Leihkauf, R. ; Kerst, U. ; Boit, Christian ; Jain, R. ; Malik, Tania ; Wilsher, K. ; Lundquist, T. ; Kruger, Bjorn

  • Author_Institution
    Berlin Univ. of Technol., Berlin
  • fYear
    2007
  • fDate
    21-26 Oct. 2007
  • Firstpage
    1
  • Lastpage
    9
  • Abstract
    IC debug with E-beam probing is presented in an innovative application accessing the active device directly from chip backside after FIB preparation. The potential of this approach in nanoscale and gigahertz dimensions is evaluated.
  • Keywords
    electron beam testing; integrated circuit testing; nanoelectronics; backside E-beam probing; innovative application; integrated circuit debug; nano scale devices; Application specific integrated circuits; Floors; Integrated circuit measurements; Optical control; Semiconductor device measurement; Signal generators; Silicon; Stimulated emission; Timing; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Conference, 2007. ITC 2007. IEEE International
  • Conference_Location
    Santa Clara, CA
  • ISSN
    1089-3539
  • Print_ISBN
    978-1-4244-1127-6
  • Electronic_ISBN
    1089-3539
  • Type

    conf

  • DOI
    10.1109/TEST.2007.4437627
  • Filename
    4437627
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2853444