• DocumentCode
    2854263
  • Title

    Real-time modeling of VLSI IC manufacturing processes

  • Author

    Volk, S.V. ; Koukharenko, S.N. ; Zayats, A.M. ; Smimov, A.G.

  • Author_Institution
    Belarusian State Univ. of Informatics & Radioelectron., Minsk
  • Volume
    2
  • fYear
    2005
  • fDate
    16-16 Sept. 2005
  • Firstpage
    453
  • Abstract
    Efficient algorithm for modeling of VLSI integrated circuits (IC) manufacturing process is considered. Scheme for organization of time-consuming computations in a separate thread to achieve real-time operation is introduced
  • Keywords
    VLSI; integrated circuit manufacture; VLSI IC manufacturing process; integrated circuit; real time modeling; time-consuming computation; very large scale integration; CMOS integrated circuits; IEEE catalog; Integrated circuit layout; Integrated circuit modeling; Lithography; Manufacturing processes; Microwave technology; Organizing; Telecommunications; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
  • Conference_Location
    Sevastopol, Crimea
  • Print_ISBN
    966-7968-80-4
  • Type

    conf

  • DOI
    10.1109/CRMICO.2005.1564988
  • Filename
    1564988