DocumentCode
2854570
Title
Nondestructive techniques for electrically-testing dielectric layers on integrated circuits
Author
Keen, J.
Author_Institution
Royal Radar Establishment, Molvern, Worcestershire, England
Volume
XV
fYear
1972
fDate
16-18 Feb. 1972
Firstpage
102
Lastpage
103
Abstract
Three nondestructive optical techniques using liquid crystals for electrically testing or evaluating the characteristics of dielectric layers on integrated circuits will be described. Explanations regarding mechanisms, uses, advantages and limitations of the technique will be given.
Keywords
Circuit testing; Dielectrics; Laser radar; Liquid crystal displays; Liquid crystals; Nondestructive testing; Optical refraction; Optical scattering; Threshold voltage; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1972 IEEE International
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1972.1155127
Filename
1155127
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