Title :
Nondestructive techniques for electrically-testing dielectric layers on integrated circuits
Author_Institution :
Royal Radar Establishment, Molvern, Worcestershire, England
Abstract :
Three nondestructive optical techniques using liquid crystals for electrically testing or evaluating the characteristics of dielectric layers on integrated circuits will be described. Explanations regarding mechanisms, uses, advantages and limitations of the technique will be given.
Keywords :
Circuit testing; Dielectrics; Laser radar; Liquid crystal displays; Liquid crystals; Nondestructive testing; Optical refraction; Optical scattering; Threshold voltage; Tin;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1972 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1972.1155127
