DocumentCode :
2855307
Title :
Ferroelectric film examination at microwaves
Author :
Poplavko, Y.M.
Author_Institution :
Nat. Tech. Univ. of Ukraine "KPI", Kiev
Volume :
2
fYear :
2005
fDate :
16-16 Sept. 2005
Firstpage :
601
Abstract :
Various methods of microwave measurement of thin dielectric film with large dielectric permittivity (epsiv~102-104) and increased loss (tandelta~10-2-1) are compared. Non-contacting and non-destructive investigation waveguide method is recommended. This method does not need electrode deposition onto a film surface, so the natural features of film are obtained
Keywords :
ferroelectric thin films; microwave measurement; permittivity; waveguides; dielectric permittivity; ferroelectric film examination; microwave measurement; noncontacting waveguide; nondestructive waveguide; thin dielectric film; Dielectric films; Dielectric loss measurement; Dielectric losses; Dielectric measurements; Electrodes; Ferroelectric films; Loss measurement; Microwave measurements; Microwave theory and techniques; Permittivity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-80-4
Type :
conf
DOI :
10.1109/CRMICO.2005.1565054
Filename :
1565054
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2855307
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