Title :
Microwave measurements of nanometer metal film on semiconductor substrate
Author :
Usanov, D.A. ; Skripal, A.V. ; Abramov, A.V. ; Bogolyubov, A.S.
Author_Institution :
Saratov State Univ.
Abstract :
Method for nondestructive multiparameter check of electrophysical parameters of nanometer metal-semiconductor structures using frequency dependence of the reflection coefficient had been proposed and implemented experimentally
Keywords :
electromagnetic wave reflection; microwave measurement; semiconductor thin films; substrates; electrophysical parameter; microwave measurement; nanometer metal film; nondestructive multiparameter; reflection coefficient; semiconductor substrate; Boolean functions; Data structures; IEEE catalog; Microwave devices; Microwave measurements; Microwave technology; Organizing; Semiconductor device measurement; Semiconductor films; Substrates;
Conference_Titel :
Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-80-4
DOI :
10.1109/CRMICO.2005.1565056
