Title :
A graphical study of the current distribution in short-channel IGFETS
Author :
Hachtel, G. ; Mack, M.
Author_Institution :
IBM T. J. Watson Research Center, Yorktown Heights, NY, USA
Abstract :
A report on the effects of channel length, L, drain diffusion junction depth, ZDJ, and the scatter-limited saturation velocity, VSATN = 107cm/s on the current distribution in short N-channel enhancement mode IGFETs, studied numerically, will be offered.
Keywords :
Boron; Current distribution; Displays; Doping; Electric variables measurement; Electron mobility; Partial differential equations; Particle scattering; Poisson equations; Space charge;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1973 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1973.1155193