Title :
A critically-damped integrated capacitive accelerometer using feedback of position and velocity
Author :
van Kampen, R.P. ; Wolffenbuttel, R.F.
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
Abstract :
A novel integrated accelerometer has been designed, in which a special servo technique based on electrostatic feedback has been implemented for linear output. The conventional position feedback with air damping has been extended by electronic means using velocity sensing based on integrated coils. A fabrication sequence is presented, which prevents breakout during manufacturing
Keywords :
accelerometers; electrostatic devices; feedback; servomechanisms; critically-damped integrated capacitive accelerometer; electrostatic feedback; fabrication sequence; integrated coils; linear output; position feedback; servo technique; velocity sensing; Acceleration; Accelerometers; Capacitive sensors; Damping; Electrostatics; Fabrication; Force feedback; Output feedback; Silicon; Voltage;
Conference_Titel :
Circuits and Systems, 1992. ISCAS '92. Proceedings., 1992 IEEE International Symposium on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-0593-0
DOI :
10.1109/ISCAS.1992.230383
