Title :
Circuit and system design for silicon microsensors
Author_Institution :
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, Germany
Abstract :
Recent advances in CMOS electronics are discussed for silicon and silicon-based sensors. The author describes the principles of sensor instrumentation and outlines practical solutions accompanied by examples of advanced sensory microsystems. Examples from several areas of sensory applications, such as pressure, light, and gas sensing, are given. Some novel approaches, such as the application of neural networks, are addressed
Keywords :
CMOS integrated circuits; electric sensing devices; elemental semiconductors; gas sensors; intelligent sensors; mechatronics; micromechanical devices; photodetectors; pressure sensors; silicon; CMOS electronics; Si; gas sensing; microsensors; neural networks; sensor instrumentation; sensory microsystems; solutions; Circuits and systems; Instruments; Microelectronics; Microsensors; Readout electronics; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Signal processing; Silicon;
Conference_Titel :
Circuits and Systems, 1992. ISCAS '92. Proceedings., 1992 IEEE International Symposium on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-0593-0
DOI :
10.1109/ISCAS.1992.230399
