DocumentCode
285676
Title
Circuit and system design for silicon microsensors
Author
Hosticka, B.J.
Author_Institution
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, Germany
Volume
4
fYear
1992
fDate
3-6 May 1992
Firstpage
1824
Abstract
Recent advances in CMOS electronics are discussed for silicon and silicon-based sensors. The author describes the principles of sensor instrumentation and outlines practical solutions accompanied by examples of advanced sensory microsystems. Examples from several areas of sensory applications, such as pressure, light, and gas sensing, are given. Some novel approaches, such as the application of neural networks, are addressed
Keywords
CMOS integrated circuits; electric sensing devices; elemental semiconductors; gas sensors; intelligent sensors; mechatronics; micromechanical devices; photodetectors; pressure sensors; silicon; CMOS electronics; Si; gas sensing; microsensors; neural networks; sensor instrumentation; sensory microsystems; solutions; Circuits and systems; Instruments; Microelectronics; Microsensors; Readout electronics; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Signal processing; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 1992. ISCAS '92. Proceedings., 1992 IEEE International Symposium on
Conference_Location
San Diego, CA
Print_ISBN
0-7803-0593-0
Type
conf
DOI
10.1109/ISCAS.1992.230399
Filename
230399
Link To Document