DocumentCode
2857171
Title
Lithography versus the device designer and processor
Volume
XVII
fYear
1974
fDate
15-13 Feb. 1974
Firstpage
86
Lastpage
86
Keywords
Circuit testing; Costs; Design engineering; Feedback loop; Integrated circuit layout; Job design; Lithography; Manufacturing processes; Process design; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1974 IEEE International
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1974.1155297
Filename
1155297
Link To Document