Title :
Fabrication and characterization of flexible flat electrodes for biomedical microdevices
Author :
Fuentes, M.C. ; Fernández, M. ; Ayerdi, I. ; Gracia, F.J.
Author_Institution :
Microelectron. & Microsyst. Dept., Univ. of Navarra, San Sebastián, Spain
Abstract :
Flat electrode arrays satisfy manifold biomedical applications. In this work, platinum flat electrodes sandwiched between two flexible PDMS layers are fabricated and characterized. A contact profilometer and a FIB/FEGSEM system are used for samples topology characterization. Electrical characterization covers I/V curves and stability tests. Platinum wavy surface reinforces the achieved samples compliance and therefore their suitability for human implant applications. However, the Pt electrical performance is strongly conditioned on the elastic PDMS layers. Fabrication process must be optimized to achieve a trade-off between mechanical and electrical behavior.
Keywords :
bioMEMS; biomechanics; elasticity; elastomers; flexible electronics; focused ion beam technology; microfabrication; platinum; scanning electron microscopy; silicones; topology; FIB-FEGSEM system; I-V curves; biomedical microdevices; contact profilometer; elastic layers; electrical behavior; electrical characterization; electrical performance; flat electrode arrays; flexible flat electrodes; flexible polydimethylsiloxane layers; mechanical behavior; platinum flat electrodes; platinum wavy surface reinforce; stability testing; topology characterization; Electrodes; Glass; Immune system; Platinum; Substrates; Thermal stability; PDMS; flat electrodes; flexible; human implant;
Conference_Titel :
Electron Devices (CDE), 2011 Spanish Conference on
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4244-7863-7
DOI :
10.1109/SCED.2011.5744214
