• DocumentCode
    2858190
  • Title

    Design and fabrication of Love-wave sensors: An experimental study

  • Author

    Matatagui, D. ; Fontecha, J. ; Fernández, M.J. ; Horrillo, M.C. ; Gràcia, I. ; Cané, C.

  • Author_Institution
    Inst. de Fis. Aplic., CSIC, Madrid, Spain
  • fYear
    2011
  • fDate
    8-11 Feb. 2011
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this work a Love-wave device based on Quartz/SiO2 has been developed considering some aspects in the design and the fabrication, in a manner that twelve different designs have been fabricated and studied their frequency response. This has allowed us to choose the most suitable device configuration in order to use it as sensor in a gas or and liquid environment.
  • Keywords
    Love waves; quartz; surface acoustic wave sensors; Love wave sensor; SiO2; frequency response; gas environment; liquid environment; Chemical sensors; Electrodes; Frequency response; Gas detectors; Reflection; Surface treatment; Love wave; SAW; SH-SAW; biosensor; gas sensor; liquid sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices (CDE), 2011 Spanish Conference on
  • Conference_Location
    Palma de Mallorca
  • Print_ISBN
    978-1-4244-7863-7
  • Type

    conf

  • DOI
    10.1109/SCED.2011.5744221
  • Filename
    5744221
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2858190