Title :
Design and fabrication of Love-wave sensors: An experimental study
Author :
Matatagui, D. ; Fontecha, J. ; Fernández, M.J. ; Horrillo, M.C. ; Gràcia, I. ; Cané, C.
Author_Institution :
Inst. de Fis. Aplic., CSIC, Madrid, Spain
Abstract :
In this work a Love-wave device based on Quartz/SiO2 has been developed considering some aspects in the design and the fabrication, in a manner that twelve different designs have been fabricated and studied their frequency response. This has allowed us to choose the most suitable device configuration in order to use it as sensor in a gas or and liquid environment.
Keywords :
Love waves; quartz; surface acoustic wave sensors; Love wave sensor; SiO2; frequency response; gas environment; liquid environment; Chemical sensors; Electrodes; Frequency response; Gas detectors; Reflection; Surface treatment; Love wave; SAW; SH-SAW; biosensor; gas sensor; liquid sensor;
Conference_Titel :
Electron Devices (CDE), 2011 Spanish Conference on
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4244-7863-7
DOI :
10.1109/SCED.2011.5744221
