Title :
Fabrication of a MEMS based high precision solar sensor for satellite applications using CMOS technology
Author :
Delgado, F.J. ; García, J. ; Tarrida, C.L. ; Quero, J.M.
Author_Institution :
Dept. de Ing. Electron., Univ. de Sevilla, Sevilla, Spain
Abstract :
This paper shows the design and fabrication of a miniaturized two-axis sun sensor for satellite attitude control, using a CMOS standard technology. The high precision will be obtained by the subdivision of field of view (FOV). A sun FOV of ±60 ° and a resolution of 0.1° will be expected.
Keywords :
CMOS integrated circuits; attitude control; microsensors; space vehicle electronics; CMOS standard technology; CMOS technology; MEMS based high precision solar sensor; miniaturized two-axis sun sensor; satellite application; satellite attitude control; Fabrication; Layout; Micromechanical devices; Photodiodes; Satellites; Silicon; Sun;
Conference_Titel :
Electron Devices (CDE), 2011 Spanish Conference on
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4244-7863-7
DOI :
10.1109/SCED.2011.5744237
