Towards a low-cost production of monodispersed microbubbles using PCB-MEMS technology

This paper describes the fabrication process of a three-dimensional flow focusing device using the PCB-MEMS technology to produce microbubbles with a controlled diameter. The proposed process involves the typical photolithographic steps used in Printed Circuit Board (PCB) fabrication and a low temperature bonding technique based on tin/lead alloy. The fabricated device can be considered as low-cost nebulizer thank to the materials and bonding technique used in the fabrication process. The experimental results provide a diameter of the produced microbubbles of 230 and 250 μm. These results fit the microbubble flow focusing theory that predicts 226.71 and 245.66 μm.