Title :
Modeling, control, and optimization: Critical technologies in semiconductor manufacturing
Author :
Poolla, Kameshwar
Author_Institution :
University of California at Berkeley, USA
Abstract :
Start of the above-titled section of the conference proceedings record.
Conference_Titel :
Computer-Aided Control Systems, 2008. CACSD 2008. IEEE International Conference on
Conference_Location :
San Antonio, TX
Print_ISBN :
978-1-4244-2221-0
DOI :
10.1109/CACSD.2008.4627327
