Title :
Modeling and feedforward control of a large-range, piezo nano-stepper
Author :
Wilcox, S. ; Devasia, S.
Author_Institution :
Dept. of Mech. Eng., Univ. of Washington, Seattle, WA, USA
fDate :
June 29 2011-July 1 2011
Abstract :
This article aims to improve the positioning performance of piezo-based nano-steppers, which have both large range and high-precision. The main contribution of this article is to show that model-based feedforward input can improve the performance of piezo-based nano-steppers by enabling operation at higher frequencies.
Keywords :
control system synthesis; feedforward; piezoelectric actuators; position control; model based feedforward input; piezo based nanostepper; positioning performance; Actuators; Dynamics; Force; Friction; Steady-state; Trajectory; Vibrations;
Conference_Titel :
American Control Conference (ACC), 2011
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4577-0080-4
DOI :
10.1109/ACC.2011.5991591
