Title :
Numerical simulations of poly-crystalline silicon thin film transistors including leakage effects
Author :
Hack, M. ; Wu, I. Wei ; Lewis, A.G. ; King, T.J.
Author_Institution :
Xerox Palo Alto Res. Center, CA, USA
Abstract :
The authors show good agreement between numerical simulations and experimental data of the electrical characteristics of poly-crystalline silicon (poly-Si) thin film transistors (TFTs). They focus on the field-effect mobility, threshold voltage, leakage current, and the so-called `kink´ effect. They demonstrate how the `on-state´ performance of these devices can be modeled by a uniform effective medium approach and show how their characteristics vary with fabrication process, which in turn determines the effective density of states (DOS) distribution. Leakage currents are modeled by adding a single grain boundary with a trap to band tunneling mechanism
Keywords :
digital simulation; elemental semiconductors; insulated gate field effect transistors; semiconductor device models; silicon; thin film transistors; band tunneling mechanism; density of states; electrical characteristics; experimental data; fabrication process effects; field-effect mobility; kink effect; leakage current; leakage effects; modeling; numerical simulations; on state performance; polycrystalline Si; polysilicon; semiconductors; single grain boundary; thin film transistors; threshold voltage; uniform effective medium approach;
Conference_Titel :
Poly-Si Devices and Applications, IEE Colloquium on
Conference_Location :
London