Title :
A MEMS Lamb wave microdevice based on ZnO thin film
Author :
Liu, Meng-wei ; Xue, Ming-xin ; Li, Jun-hong ; Li, Xin
Author_Institution :
Inst. of Acoust., Chinese Acad. of Sci., Beijing, China
Abstract :
MEMS Lamb wave ultrasonic devices have been shown to be extremely useful for applications of sensor, actuator, resonator, and so on. This paper presents the design and fabrication of Lamb wave microdevice based on ZnO piezoelectric film. The Lamb waves were respectively launched and received by both Al interdigital transducers deposited on ZnO/Al/LTO/Si3N4/Si thin piezoelectric composite plate. The detail fabrication procedure of microdevice and characteristics of the ZnO film were presented. A novel method to obtain the piezoelectric constant of the ZnO film was used in this paper. The experimental results for characterizing the wave propagation modes and their frequencies of the Lamb wave microdevice indicated the measured center frequency of antisymmetric A0 and symmetric S0 modes Lamb wave agree with the theoretical predictions.
Keywords :
aluminium; composite materials; interdigital transducers; lithium compounds; microfabrication; micromechanical devices; piezoelectric thin films; silicon compounds; surface acoustic waves; titanium compounds; ultrasonic devices; wave propagation; wide band gap semiconductors; zinc compounds; MEMS lamb wave microdevice; MEMS lamb wave ultrasonic device; ZnO-Al-Li4Ti5O-Si3N4-Si; actuator; center frequency measurement; interdigital transducer; piezoelectric thin film; resonator; sensor application; thin piezoelectric composite plate; wave propagation mode; Electrodes; Films; Frequency measurement; Micromechanical devices; Silicon; Zinc oxide; Lamb wave; MEMS; Piezoelectric composite plate; ZnO film;
Conference_Titel :
Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2010 Symposium on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-9822-2
DOI :
10.1109/SPAWDA.2010.5744355
