Position control of SPMSM for wafer process using Sliding Mode Controller

This paper present position control method of SPMSM using Improved Sliding Mode Controller (ISMC) which has not only dynamic performance of PI controller but also robust characteristics of sliding mode controller for wafer processing robot. In order to verify performances of proposed position control method, performances of PI controller using decided sliding trajectory by position error, sliding mode control (SMC) that can obtain large torque, and improved sliding mode control is compared. To verify performances, SPMSM that has 200[w] rated power be adopted. Performances of Position controller using ISMC is verified by simulation and experimental results.