Title :
Micromechanical resonators with integrated waveguides and Fabry-Perot cavities
Author :
Pruessner, Marcel W. ; Stievater, Todd H. ; Rabinovich, William S.
Author_Institution :
Photonics Technol. Branch (Code 5654), Naval Res. Lab., Washington, DC
Abstract :
Micromechanical resonators incorporating waveguide Fabry-Perot cavities are designed and losses affecting optical finesse are studied. A doubling of the effective Q-factor in a coupledoptical-mechanical resonator is obtained, enabling high-resolution resonant sensors with optical readout.
Keywords :
Fabry-Perot resonators; Q-factor; micro-optics; micromechanical resonators; optical design techniques; optical losses; optical resonators; optical waveguides; Fabry-Perot cavities; Q-factor; high-resolution resonant sensors; integrated waveguides; micromechanical resonators; optical readout; optical-mechanical resonator; Fabry-Perot; Micromechanical devices; Optical coupling; Optical design; Optical losses; Optical resonators; Optical sensors; Optical waveguides; Q factor; Resonance; (130.3120) Integrated optics devices; (130.6010) Sensors;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627588
