Title : 
Conducting force microscopy and hole charging in Ge islands grown by RF sputtering
         
        
            Author : 
Das, S. ; Singha, R.K. ; Dhar, A. ; Ray, S.K.
         
        
            Author_Institution : 
Indian Inst. of Technol. Kharagpur, Kharagpur, India
         
        
        
        
        
        
            Abstract : 
We have grown self assembled nearly monomodal Ge islands on Si(100) using RF magnetron sputtering at a much higher pressure compared to molecular beam epitaxy. Raman spectra of the grown sample exhibits the formation of strained Ge islands intermixed with Si. Both the Both the conducting atomic force microscopy image and I-V characteristics of individual Ge islands exhibit hole charging in isolated form.
         
        
            Keywords : 
Raman spectra; atomic force microscopy; elemental semiconductors; germanium; nanostructured materials; self-assembly; sputter deposition; Ge; I-V characteristics; RF magnetron sputtering; Raman spectra; Si; Si(100) surface; atomic force microscopy; conducting force microscopy; hole charging; Atomic force microscopy; Force; Radio frequency; Silicon; Sputtering; Substrates; CAFM; germanium nanoislands; hole charging;
         
        
        
        
            Conference_Titel : 
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
         
        
            Conference_Location : 
Tao-Yuan
         
        
        
            Print_ISBN : 
978-1-4577-0379-9
         
        
            Electronic_ISBN : 
2159-3523
         
        
        
            DOI : 
10.1109/INEC.2011.5991647