• DocumentCode
    2861036
  • Title

    Conducting force microscopy and hole charging in Ge islands grown by RF sputtering

  • Author

    Das, S. ; Singha, R.K. ; Dhar, A. ; Ray, S.K.

  • Author_Institution
    Indian Inst. of Technol. Kharagpur, Kharagpur, India
  • fYear
    2011
  • fDate
    21-24 June 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have grown self assembled nearly monomodal Ge islands on Si(100) using RF magnetron sputtering at a much higher pressure compared to molecular beam epitaxy. Raman spectra of the grown sample exhibits the formation of strained Ge islands intermixed with Si. Both the Both the conducting atomic force microscopy image and I-V characteristics of individual Ge islands exhibit hole charging in isolated form.
  • Keywords
    Raman spectra; atomic force microscopy; elemental semiconductors; germanium; nanostructured materials; self-assembly; sputter deposition; Ge; I-V characteristics; RF magnetron sputtering; Raman spectra; Si; Si(100) surface; atomic force microscopy; conducting force microscopy; hole charging; Atomic force microscopy; Force; Radio frequency; Silicon; Sputtering; Substrates; CAFM; germanium nanoislands; hole charging;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2011 IEEE 4th International
  • Conference_Location
    Tao-Yuan
  • ISSN
    2159-3523
  • Print_ISBN
    978-1-4577-0379-9
  • Electronic_ISBN
    2159-3523
  • Type

    conf

  • DOI
    10.1109/INEC.2011.5991647
  • Filename
    5991647