DocumentCode
2861036
Title
Conducting force microscopy and hole charging in Ge islands grown by RF sputtering
Author
Das, S. ; Singha, R.K. ; Dhar, A. ; Ray, S.K.
Author_Institution
Indian Inst. of Technol. Kharagpur, Kharagpur, India
fYear
2011
fDate
21-24 June 2011
Firstpage
1
Lastpage
2
Abstract
We have grown self assembled nearly monomodal Ge islands on Si(100) using RF magnetron sputtering at a much higher pressure compared to molecular beam epitaxy. Raman spectra of the grown sample exhibits the formation of strained Ge islands intermixed with Si. Both the Both the conducting atomic force microscopy image and I-V characteristics of individual Ge islands exhibit hole charging in isolated form.
Keywords
Raman spectra; atomic force microscopy; elemental semiconductors; germanium; nanostructured materials; self-assembly; sputter deposition; Ge; I-V characteristics; RF magnetron sputtering; Raman spectra; Si; Si(100) surface; atomic force microscopy; conducting force microscopy; hole charging; Atomic force microscopy; Force; Radio frequency; Silicon; Sputtering; Substrates; CAFM; germanium nanoislands; hole charging;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location
Tao-Yuan
ISSN
2159-3523
Print_ISBN
978-1-4577-0379-9
Electronic_ISBN
2159-3523
Type
conf
DOI
10.1109/INEC.2011.5991647
Filename
5991647
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