DocumentCode :
2861036
Title :
Conducting force microscopy and hole charging in Ge islands grown by RF sputtering
Author :
Das, S. ; Singha, R.K. ; Dhar, A. ; Ray, S.K.
Author_Institution :
Indian Inst. of Technol. Kharagpur, Kharagpur, India
fYear :
2011
fDate :
21-24 June 2011
Firstpage :
1
Lastpage :
2
Abstract :
We have grown self assembled nearly monomodal Ge islands on Si(100) using RF magnetron sputtering at a much higher pressure compared to molecular beam epitaxy. Raman spectra of the grown sample exhibits the formation of strained Ge islands intermixed with Si. Both the Both the conducting atomic force microscopy image and I-V characteristics of individual Ge islands exhibit hole charging in isolated form.
Keywords :
Raman spectra; atomic force microscopy; elemental semiconductors; germanium; nanostructured materials; self-assembly; sputter deposition; Ge; I-V characteristics; RF magnetron sputtering; Raman spectra; Si; Si(100) surface; atomic force microscopy; conducting force microscopy; hole charging; Atomic force microscopy; Force; Radio frequency; Silicon; Sputtering; Substrates; CAFM; germanium nanoislands; hole charging;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
ISSN :
2159-3523
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
Type :
conf
DOI :
10.1109/INEC.2011.5991647
Filename :
5991647
Link To Document :
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