Title :
Recent progress in silicon double inversion of three-dimensional polymer templates
Author :
Hermatschweiler, M. ; Deubel, M. ; Wegener, M. ; Pérez-Willard, F. ; Tétreault, N. ; Ozin, G.A. ; von Freymann, G.
Author_Institution :
Inst. fur Angewandte Phys., Univ. Karlsruhe, Karlsruhe
Abstract :
We present recent progress in converting polymer templates into three-dimensional silicon photonic crystals by using a silicon-double-inversion procedure. This has led to woodpiles with both improved structural and optical quality.
Keywords :
elemental semiconductors; optical polymers; photonic crystals; silicon; 3D polymer templates; Si; photonic crystals; silicon-double-inversion procedure; Holographic optical components; Holography; Optical device fabrication; Optical refraction; Optical resonators; Optical waveguides; Photonic crystals; Polymers; Resists; Silicon compounds; (160.4670) Optical materials; (220.4000) Microstructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627616
