DocumentCode
2861758
Title
I2L with self-aligned double-diffusion injector
Author
Tokumaru, Y. ; Shinozaki, S. ; Nakai, Mitsuki ; Ito, Satoshi ; Nishi, Yoshio
Author_Institution
Tokyo Shibaura Electric Co., Ltd., Kawasaki, Japan
Volume
XIX
fYear
1976
fDate
18-20 Feb. 1976
Firstpage
100
Lastpage
101
Abstract
A I2L structure embracing a self-aligned double diffusion injector will be described. A power delay product of 0.06 pJ/gate with a minimum delay of 10 ns at 80 μW have been obtained.
Keywords
Boron; Circuits; Conductivity; Delay; Impurities; Indium tin oxide; Influenza; Silicon; Substrates; Tiles;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1976 IEEE International
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1976.1155587
Filename
1155587
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