Title :
Optical differential pressure transducer using planar Bragg gratings in an etched membrane
Author :
Holmes, C. ; Gates, J.C. ; Kundys, D.O. ; Gawith, C.B.E. ; Sparrow, I.J.G. ; Emmerson, G.D. ; Smith, P.G.R.
Author_Institution :
Optoelectron. Res. Centre, Southampton Univ., Southampton, UK
Abstract :
Diaphragms are one of the most widely used and suitable mechanical structures for use as a pressure sensing element. Pressure applied to one (or both) side(s) of the diaphragm will cause it to deflect until the elastic force balances the pressure; this induces stress along the diaphragm´s length. Our presented device monitors this stress using planar Bragg gratings. Similar pressure diaphragm sensors have been reported using embedded fibre Bragg gratings but these do not offer the advantages of monolithic integration and fabrication.
Keywords :
Bragg gratings; diaphragms; etching; integrated optics; membranes; optical sensors; pressure sensors; stress measurement; diaphragms; elastic force; etched membrane; mechanical structures; monolithic integration; optical differential pressure transducer; planar Bragg gratings; pressure sensing element; stress monitoring; Biomembranes; Bragg gratings; Etching; Fiber gratings; Force sensors; Optical fiber devices; Optical fiber sensors; Optical sensors; Stress; Transducers;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5196283
