DocumentCode :
2862302
Title :
Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application
Author :
Wang, Chung-Ming ; Kuo, Chia-Hao ; Lin, Horng-Chih ; Huang, Tiao-Yuan
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear :
2011
fDate :
21-24 June 2011
Firstpage :
1
Lastpage :
2
Abstract :
In this paper, we have fabricated a novel TFT with suspended NW channels and used such device for NH3 monitoring. We can observe the detection signals, including Vth and drain current, when the NH3 is introduced.
Keywords :
gas sensors; nanowires; thin film transistors; NH3 monitoring; detection signals; drain current; gas sensor application; suspended nanowire thin film transistor; Fabrication; Force; Gas detectors; Logic gates; Nanoscale devices; Thin film transistors; Suspended; gas sensor; nanowire TFT;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
ISSN :
2159-3523
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
Type :
conf
DOI :
10.1109/INEC.2011.5991723
Filename :
5991723
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2862302
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