• DocumentCode
    2862856
  • Title

    Improved microelectronics manufacturing using new laser technologies

  • Author

    Swenson, Edward J.

  • Author_Institution
    Electro Sci. Ind., Inc., Portland, OR
  • fYear
    2006
  • fDate
    21-26 May 2006
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The use of the 1.3 line and third harmonic of the diode pumped Nd:YAG laser provides a variety of new methods to address the continued advance towards smaller, lighter more complex microelectronics.
  • Keywords
    integrated circuit manufacture; neodymium; optical pumping; solid lasers; YAG:Nd; complex microelectronics; diode pumped laser; laser technologies; microelectronics manufacturing; solid laser; Ceramics; Laser beam cutting; Laser excitation; Laser transitions; Laser tuning; Manufacturing; Microelectronics; Production; Pump lasers; Resistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
  • Conference_Location
    Long Beach, CA
  • Print_ISBN
    978-1-55752-813-1
  • Electronic_ISBN
    978-1-55752-813-1
  • Type

    conf

  • DOI
    10.1109/CLEO.2006.4627714
  • Filename
    4627714
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2862856