3D finite element simulation of morphological effect on reflectance of Si3N4 sub-wavelength structures for silicon solar cells

Author

Li, Yiming ; Lee, Ming-Yi ; Cheng, Hui-Wen ; Lu, Zheng-Liang ; Sahoo, Kartika Chandra ; Chang, Edward Yi

Author_Institution

Dept. of Electr. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

fYear

2011

fDate

21-24 June 2011

Firstpage

1

Lastpage

2

Abstract

In this work, three-dimensional (3D) study on the reflectance spectrum of silicon nitride (Si3N4) sub-wavelength structure (SWS) is conducted using finite element analysis. With proper boundary conditions, the morphological effect on reflectance property of cylinder-, right circular cone, and square pyramid-shape Si₃N₄ SWS is discussed.

Keywords

elemental semiconductors; finite element analysis; reflectivity; silicon; silicon compounds; solar cells; surface morphology; 3D finite element simulation; Si; Si₃N₄; cylinder cone; morphological effect; reflectance property; reflectance spectrum; right circular cone; silicon nitride; silicon solar cells; square pyramid-shape; sub-wavelength structures; Boundary conditions; Finite element methods; Photovoltaic cells; Reflectivity; Silicon; Solid modeling; Three dimensional displays; 3D modeling; finite element simulation; reflectance; silicon nitride; solar cell; sub-wavelength structure;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoelectronics Conference (INEC), 2011 IEEE 4th International

Conference_Location

Tao-Yuan

ISSN

2159-3523

Print_ISBN

978-1-4577-0379-9

Electronic_ISBN

2159-3523

Type

conf

DOI

10.1109/INEC.2011.5991760

Filename

5991760