Generalized solving scheme of line-series-shunt type calibration for broadband on-wafer scattering parameter measurements

This paper presents a generalized solving scheme of the line-series-shunt (LST) type calibration technique, instead of the lossy transmission line (TL) assumption on the series/shunt standards in previous studies, for broadband on-wafer scattering parameter measurements. We utilize additional TL sections for the series/shunt standards to acquire their parasitic elements directly, as well as other calibration parameters including TL propagation constant, series impedance, and shunt admittance, by two more determining equations in the self-calibration procedure. This approach relaxes the constraint on the series/shunt standards which may not satisfy the lossy TL assumption in the parasitic evaluations. The proposed method is examined by the GaAs microstrip test structure with verifications of the plain LST and the thru-reflect-line (TRL) calibrations.