Title :
Buried-channel CCD imaging arrays with tin-oxide transparent gates
Author :
McCann, D. ; Turley, A. ; Hall, Jeffrey ; Walker, Julian ; Tracy, R. ; White, M. ; Thompson, Lachlan
Author_Institution :
Westinghouse Electric Corp., Baltimore, MD, USA
Abstract :
The fabrication and performance of CCD imaging arrays with transparent gate tin-oxide electrodes will be presented. Imagers described will include 1 × 256 linear, 100 × 100 area and 29 × 9 TDI sensors.
Keywords :
Aluminum; Charge coupled devices; Electrodes; Integrated circuit interconnections; Phased arrays; Registers; Sensor arrays; Silicon; Solid state circuits; Tin;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1978 IEEE International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ISSCC.1978.1155849
