Title :
High efficiency and low loss fully integrated passive waveguide mode converters
Author :
Holmes, B.M. ; Hutchings, D.C.
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. of Glasgow, Glasgow
Abstract :
Fully integrated GaAs/AlGaAs passive waveguide polarisation converters realised through the use of reactive ion etch lag (RIE Lag) is reported. The devices characterised at lambda=0.9 mum produce TE-TM conversion efficiencies in excess of 96%.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; optical fabrication; optical materials; optical planar waveguides; optical waveguide components; sputter etching; GaAs-AlGaAs; TE-TM conversion efficiency; integrated passive waveguide mode converters; low-loss waveguide polarisation converters; planar waveguide; reactive ion etch lag; wavelength 0.9 mum; Dry etching; Insertion loss; Integrated optics; Isolators; Optical devices; Optical polarization; Optical waveguides; Particle beam optics; Planar waveguides; Wet etching; (230.3120) Integrated optics devices; (230.3240) Isolators; (230.5440) Polarization-sensitive devices; (230.7390) Waveguides, planar;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627937
