Title :
Characterization of a 90° waveguide bend using near-field scanning optical microscopy
Author :
Yuan, Guangwei ; Stephens, Matthew D. ; Dandy, David S. ; Lear, Kevin L.
Author_Institution :
Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO
Abstract :
Multiple modes are directly imaged in a silicon nitride waveguide bend using near-field scanning optical microscopy (NSOM). The observations are in good agreement with modal calculations using conformal index transformation.
Keywords :
conformal mapping; near-field scanning optical microscopy; optical testing; optical waveguides; silicon compounds; waveguide discontinuities; wide band gap semiconductors; NSOM; SiN; conformal index transformation; modal calculation; near-field scanning optical microscopy; silicon nitride waveguide bend characterization; Attenuation; Biology computing; Biomedical optical imaging; Interference; Optical microscopy; Optical sensors; Optical surface waves; Optical waveguide theory; Optical waveguides; Surface topography; (000.0000) General;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627942
