An Automatic MEMS Testing System based on Computer Microvision

Author

Dong, Zheng ; Huang, Dagui ; Zhang, Deyin ; Wu, Wenrong

Author_Institution

Sch. of Mechatronics Eng., Univ. of Electron. Sci. & Technol. of China, Sichuan

fYear

2006

fDate

25-28 June 2006

Firstpage

854

Lastpage

858

Abstract

Measurement of the microelectromechanical systems (MEMS) is critical for device design, simulation and material property characterization. According to the requirement of MEMS test, we have developed tools for in situ measurement of characteristics of MEMS based on computer microvision. The method uses video imaging under continuous illumination, and it can be applied to the geometry and in-plane motion measurement of MEMS. The magnitude of the displacement is obtained with blur image synthesis technique and high measure accuracy can be achieved with sub-pixel location technique. In this paper, a study on measurement of a microresonator is presented. From the experiment results it can be seen that this system can measure motions of MEMS with nanometer resolution

Keywords

automatic testing; computer vision; micromechanical devices; automatic MEMS testing system; blur image synthesis technique; computer microvision; microelectromechanical systems; nanometer resolution; subpixel location technique; video imaging; Automatic testing; Computational modeling; Geometry; Image generation; Lighting; Material properties; Microelectromechanical systems; Micromechanical devices; Motion measurement; System testing; MEMS test; computer microvision; image analysis; image processing; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation, Proceedings of the 2006 IEEE International Conference on

Conference_Location

Luoyang, Henan

Print_ISBN

1-4244-0465-7

Electronic_ISBN

1-4244-0466-5

Type

conf

DOI

10.1109/ICMA.2006.257721

Filename

4026196