DocumentCode
2866778
Title
Integrated signal conditioning for diaphragm pressure sensors
Author
Borky, J. ; Wise, K.
Author_Institution
Air Force Institute of Technology, Wright-Patterson AFB, OH, USA
Volume
XXII
fYear
1979
fDate
14-16 Feb. 1979
Firstpage
196
Lastpage
197
Abstract
A silicon thin-diaphragm piezoresistive pressure sensor incorporating signal conditioning has been developed. The device exhibits 1% accuracy over a wide pressure range, requiring only two leads and no external components.
Keywords
Biomedical measurements; Biosensors; Bridge circuits; Mechanical sensors; Resistors; Sensor phenomena and characterization; Silicon; Temperature distribution; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1979 IEEE International
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1979.1155903
Filename
1155903
Link To Document