DocumentCode
2867442
Title
16K CMOS/SOS asynchronous static RAM
Author
Stewart, R. ; Dingwall, A.
Author_Institution
RCA Laboratories, Somerville, NJ
Volume
XXII
fYear
1979
fDate
14-16 Feb. 1979
Firstpage
104
Lastpage
105
Abstract
A CMOS/SOS buried contact process allowing fabrication of dense static memory cells will be described. The technology has been applied to a 16K 5μ polysilicongate RAM with
(1.78 mil2) cells.
(1.78 mil2) cells.Keywords
CMOS technology; Epitaxial layers; Laboratories; Logic devices; Power supplies; Random access memory; Read-write memory; Solid state circuits; Voltage; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1979 IEEE International
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1979.1155941
Filename
1155941
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