• DocumentCode
    2867496
  • Title

    2000 ASMC keynote speakers

  • fYear
    2000
  • fDate
    12-14 Sept. 2000
  • Firstpage
    472
  • Lastpage
    480
  • Abstract
    Provides an abstract of the keynote presentation and a brief professional biography of the presenters. The complete presentation was not made available for publication as part of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI
  • Conference_Location
    Boston, MA, USA
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-5921-6
  • Type

    conf

  • DOI
    10.1109/ASMC.2000.902632
  • Filename
    902632