Title :
Intelligent control and diagnosis of chemical etch processes
Author :
Lirov, Yuval ; Melamed, Benjamin ; Morris, R.J.T.
Author_Institution :
AT&T Bell Laboratories
Keywords :
Chemical processes; Chemical products; Control systems; Etching; Fault diagnosis; Flowcharts; Intelligent control; Knowledge engineering; Nonlinear dynamical systems; Prototypes;
Conference_Titel :
Control and Applications, 1989. Proceedings. ICCON '89. IEEE International Conference on
DOI :
10.1109/ICCON.1989.770646
