DocumentCode
2867600
Title
Intelligent control and diagnosis of chemical etch processes
Author
Lirov, Yuval ; Melamed, Benjamin ; Morris, R.J.T.
Author_Institution
AT&T Bell Laboratories
fYear
1989
fDate
1989
Firstpage
889
Lastpage
891
Keywords
Chemical processes; Chemical products; Control systems; Etching; Fault diagnosis; Flowcharts; Intelligent control; Knowledge engineering; Nonlinear dynamical systems; Prototypes;
fLanguage
English
Publisher
ieee
Conference_Titel
Control and Applications, 1989. Proceedings. ICCON '89. IEEE International Conference on
Type
conf
DOI
10.1109/ICCON.1989.770646
Filename
770646
Link To Document