• DocumentCode
    2869695
  • Title

    Direct IC pattern generation by laser writing

  • Author

    Moulic, J. ; Kleinfelder, W.

  • Author_Institution
    IBM Corp, Poughkeepsie, NY, USA
  • Volume
    XXIII
  • fYear
    1980
  • fDate
    13-15 Feb. 1980
  • Firstpage
    210
  • Lastpage
    211
  • Abstract
    A flexible IC pattern-generating laser, tool enabling modification of features by direct photoresist exposure, while viewing existing patterns, will be covered. Technique eliminates need for precision registration alignment.
  • Keywords
    Aluminum; Chemical lasers; Control systems; Laser modes; Laser transitions; Optical control; Optical design; Power lasers; Resists; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1980.1156073
  • Filename
    1156073
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2869695