DocumentCode :
2869821
Title :
Sensors and MEMS
Author :
Yoon, Euisik ; Ayazi, Farrokh
Author_Institution :
University of Minnesota, Minneapolis, MN
fYear :
2007
fDate :
11-15 Feb. 2007
Firstpage :
378
Lastpage :
379
Keywords :
CMOS process; CMOS technology; Capacitive sensors; Integrated circuit technology; Magnetic field induced strain; Magnetic sensors; Micromechanical devices; Paper technology; Temperature sensors; Wireless sensor networks;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference, 2007. ISSCC 2007. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA, USA
ISSN :
0193-6530
Print_ISBN :
1-4244-0853-9
Electronic_ISBN :
0193-6530
Type :
conf
DOI :
10.1109/ISSCC.2007.373452
Filename :
4242423
Link To Document :
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