• DocumentCode
    2869943
  • Title

    Development of high power RF MEMS switches

  • Author

    Hong, J.S. ; Tan, S.G. ; Cui, Z. ; Wang, L. ; Greed, R.B. ; Voyce, D.C.

  • Author_Institution
    Dept. of Electr., Electron. & Comput. Eng., Heriot-Watt Univ., Edinburgh, UK
  • fYear
    2004
  • fDate
    18-21 Aug. 2004
  • Abstract
    This paper reports on recent developments of high power RF MEMS switch. An approach using a matrix of switching elements for the development is introduced. The design and modelling of a 2 × 2 RF MEMS switch matrix of this type is described. The fabrication processes are presented.
  • Keywords
    microswitches; microwave switches; fabrication processes; high power RF MEMS switches; switching elements matrix; Bridge circuits; Communication switching; Electrodes; Insertion loss; Microwave devices; Power engineering and energy; Power engineering computing; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Millimeter Wave Technology, 2004. ICMMT 4th International Conference on, Proceedings
  • Print_ISBN
    0-7803-8401-6
  • Type

    conf

  • DOI
    10.1109/ICMMT.2004.1411437
  • Filename
    1411437