An Integrated Gravimetric FBAR Circuit for Operation in Liquids Using a Flip-Chip Extended 0.13μm CMOS Technology

Author

Augustyniak, M. ; Weber, W. ; Beer, G. ; Mulatz, H. ; Elbrecht, L. ; Timme, H.-J. ; Tiebout, M. ; Simburger, W. ; Paulus, C. ; Eversmann, B. ; Schmitt-Landsiedel, D. ; Thewes, R. ; Brederlow, R.

fYear

2007

fDate

11-15 Feb. 2007

Firstpage

392

Lastpage

610

Abstract

A 0.13μm CMOS chip is fabricated with eight resonator-amplifiers to demonstrate a highly integrated gravimetric sensor based on an FBAR oscillator. The oscillator is attached via flip-chip bonding to a CMOS resonator. Each active 1.86GHz oscillator draws 27mA from a single 17V supply for 200×200μm² sensors. The resonance frequency shifts by 5MHz in ethanol and 7.3MHz in water and jitter is <3kHz

Keywords

CMOS integrated circuits; UHF oscillators; acoustic resonators; bonding processes; bulk acoustic wave devices; flip-chip devices; gravimeters; sensors; 0.13 micron; 1.86 GHz; 17 V; 27 mA; CMOS chip; CMOS resonator; CMOS technology; FBAR oscillator; film bulk acoustic wave circuit; flip-chip bonding; flip-chip extension; gravimetric FBAR circuit; gravimetric sensor; resonator-amplifiers; Bonding; CMOS technology; Ethanol; Film bulk acoustic resonators; Integrated circuit technology; Jitter; Liquids; Oscillators; Resonance; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2007. ISSCC 2007. Digest of Technical Papers. IEEE International

Conference_Location

San Francisco, CA

ISSN

0193-6530

Print_ISBN

1-4244-0852-0

Electronic_ISBN

0193-6530

Type

conf

DOI

10.1109/ISSCC.2007.373459

Filename

4242430