Title :
Humidity sensing properties of zinc oxide nanorod and nanobelt films
Author :
Shu, Yunxing ; Zhang, Yongsheng ; Yu, Ke
Author_Institution :
Sch. of Mechatronic Eng., Wuhan Univ. of Technol.
Abstract :
ZnO nanorod and nanobelt films were prepared on the Si substrates with comb type Pt electrodes by the vapor-phase transport method and their humidity sensitive characteristics have been investigated. It was found that the resistance of the films decreases with increasing relative humidity (RH). At room temperature (RT), resistance changes of more than four and two orders of magnitude were observed when ZnO nanobelt and nanorod devices were exposed respectively to a moisture pulse of 97% relative humidity. It appears that the ZnO nanomaterial films can be used as efficient humidity sensors
Keywords :
II-VI semiconductors; electrical resistivity; humidity sensors; nanostructured materials; platinum; semiconductor thin films; wide band gap semiconductors; zinc compounds; 293 to 298 K; Pt; Si; Si substrates; ZnO; comb type Pt electrodes; humidity sensors; nanobelt films; relative humidity; vapor-phase transport; zinc oxide nanorod films; Chemical sensors; Electrodes; Humidity; Immune system; Polymer films; Semiconductor films; Sensor phenomena and characterization; Substrates; Temperature sensors; Zinc oxide; Humidity sensor; Vapor-phase transport; Zinc oxide nanomaterial;
Conference_Titel :
Mechatronics and Automation, Proceedings of the 2006 IEEE International Conference on
Conference_Location :
Luoyang, Henan
Print_ISBN :
1-4244-0465-7
Electronic_ISBN :
1-4244-0466-5
DOI :
10.1109/ICMA.2006.257597
